Prototyping of the computer integrated manufacturing processes of MEMS in a desktop micro-factory

Abstract

The potential of MEMS application is very high and its benefit is widely recognized. However, there are some difficulties in the production, for example, the post process of MEMS, packaging, dieing and test are all separate processes and this is different to the wafer mass production procedure. Desktop microfactory, a novel concept for the manufacture of MEMS, was proposed to effectively utilize the small fabricating facilities available nowadays for the production of miniature products or parts. Desktop micro-factory is a compact production system with its facilities so small that the whole shop floor arrangement can be mounted on a table. Obviously, it is highly mobile and its operation can be kept stable while the entire production environment is shielded from interference. In this paper, establishment of a prototyping system of a desktop micro-factory for the packaging process of accelerometer in desktop micro-factory is discussed. Computer integrated manufacturing system (CIMS) approach is applied to design the system. Based on the modelling of the micro-factory and its production activities, the simulation of the manufacturing process was realized. The work provided experience and basis for deeper understanding of micro-CIM, micro production process planning, micro production system modelling, and for further development of an effectively workable micro-factory.