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Novel acid amplifier generating disulfonimide as superacid

Journal of Photopolymer Science and Technology (2017) 30(6) 645-649
DOI: 10.2494/photopolymer.30.645
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Abstract

Disulfonimide acid amplifier which produces superacid was newly designed and synthesized. This compound exhibited high acid generation efficiency and thermal stability on a polymer film. Further, this compound enhanced the sensitivity in the positive chemically amplified photoresist system.

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Tsuchimura, T., & Kawabata, T. (2017). Novel acid amplifier generating disulfonimide as superacid. Journal of Photopolymer Science and Technology, 30(6), 645–649. https://doi.org/10.2494/photopolymer.30.645

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