Chemical analysis and non-linear optical properties of TiO 2 thin films

Abstract

In the present work, TiO 2 thin films were deposited on quartz substrate by ion beam sputtering method at varying oxygen partial pressure. The film deposition on the substrate was confirmed by x-ray photoelectron spectroscopy technique. From the results of closed aperture z-scan performed using He-Ne laser, the value of non-linear refractive indices were found decreasing with increase in partial pressure. Thermo-optic coefficient also decreased with increase in oxygen partial pressure, operated during the process of deposition.