High-resolution X-ray topography of threading edge dislocations in 4H-SiC using a novel nuclear emulsion film improved special resolution and sensitivity

Abstract

We developed a nuclear emulsion film in order to improve the spatial resolution of X-ray topography (XRT). The film allowed detection of threading edge dislocations (TEDs) in a 4H-SiC single-crystal substrate over a large area by grazing-incidence monochromatic XRT at a practical level of sensitivity. The directions of the Burgers vectors of the observed TEDs were also determined.