Oxygen Plasma Interactions with Molybdenum: Formation of Volatile Molybdenum Oxides.

Abstract

The oxidation of molybdenum by oxygen plasma was studied. The oxygen plasma was discharged by helicon wave at the frequency of 18.1 MHZ and at the power of 200 W. The weight change of molybdenum in oxygen plasma was measured at 400 degrees C and at oxygen pressure of 5 Pa. The specimen was found to be oxidized and to lose it's weight drastically with the oxygen plasma, while the weight change of the specimen in the oxidation without plasma was not observed under the same condltions. The energetic species of oxygen atoms generated by rf plasma is regarded to accelerate the oxidation of molybdenum and the oxidation leads to the fonTlation of volatile molybdenum trioxide at the surface.