Influence of Thermal Treatment on the Cross-Sectional Properties of Aerosol-Deposited Pb(Mg1/3Nb2/3)O3−PbTiO3 Thick Films

Abstract

The thermal treatment of electromechanically active thick films prepared by aerosol deposition (AD) is a common practice to improve their electrical and electromechanical properties. We report on how post-deposition annealing in air affects the unique cross-sectional microstructure and mechanical properties of 0.9Pb(Mg1/3Nb2/3)O3−0.1PbTiO3 thick films prepared by AD. Transmission electron microscopy revealed minor but detectable changes, such as pore redistribution and grain growth after annealing at 500 °C. We also showed that the stainless-steel substrate is strongly affected by the annealing. The hardness and Young’s modulus of the films increased after annealing, with both properties being discussed in terms of their distribution over the cross-sections of the films.