Effect of bridging and terminal alkyl groups on structural and mechanical properties of porous organosilicate films

7Citations
Citations of this article
17Readers
Mendeley users who have this article in their library.

Abstract

Chemical composition, pore structure and mechanical properties of porous organosilicate low-k films with terminal and bridging organic groups are studied. It is shown that BTMSE based low-k films with alkyl bridge between the Si atoms have non-uniform pore structure with internal voids (ink-bottle like pores) while the films with terminal alkyl groups have pores with cylindrical shape. All studied spin-on deposited films have better mechanical properties than PECVD films with similar chemical composition and porosity. The best mechanical properties showed alkyl bridged low-k films. Moreover, the Young’s modulus increases with BTMSE content because of higher concentration of bridging bonds.

Cite

CITATION STYLE

APA

Nenashev, R., Wang, Y., Liu, C., Kotova, N., Vorotilov, K., Zhang, J., … Baklanov, M. R. (2017). Effect of bridging and terminal alkyl groups on structural and mechanical properties of porous organosilicate films. ECS Journal of Solid State Science and Technology, 6(10), N182–N188. https://doi.org/10.1149/2.0071710jss

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free