Ion beam assisted deposition

Abstract

The bombardment of a growing film with energetic particles has been observed to produce beneficial modifications in a number of microstructural features and physical and mechanical properties critical to the performance of thin films and coatings. Such modifications include: improved adhesion; densification of films grown at low substrate temperatures; magnitude and sign of growth-induced residual stresses; control of texture (orientation); grain size and morphology; optical and other physical properties; and mechanical properties such as hardness and ductility. In this chapter, we provide an overview of the role of ion-solid interactions on the microstructures and properties of vapor deposited thin films.