Abstract
The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media. © 2011 The Electrochemical Society.
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CITATION STYLE
Cho, J. Y., Cui, H., Park, J. H., Park, H. S., & Park, J. G. (2011). Effect of nonionic polymer as corrosion inhibitor in alkaline media for polycrystalline Ge2Sb2Te5 chemical mechanical planarization. Electrochemical and Solid-State Letters, 14(11). https://doi.org/10.1149/2.007111esl
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