The design, alignment, and operation of modern aberration-corrected charged particle optical systems rely on a number of theoretical and computational advancements. We give a survey of the methods and concepts which have proven useful for our research on aberration correctors for a large variety of instruments. Additionally, we discuss the assessment and optimization of the optical performance of aberration-corrected systems during design and development. We illustrate this with the hexapole Cs-corrector for CTEM and STEM as an example and discuss some of the more recent directions in which the development of aberration-corrected systems will proceed. © 2008 Elsevier B.V. All rights reserved.
Müller, H., Uhlemann, S., Hartel, P., & Haider, M. (2008). Aberration-corrected optics: From an idea to a device. In Physics Procedia (Vol. 1, pp. 167–178). https://doi.org/10.1016/j.phpro.2008.07.093