Investigation of CaTiO3:Pr3+thin films deposited by radiofrequency reactive magnetron sputtering for electroluminescence application

Abstract

In this report we successfully deposited thin films of CaTiO3:Pr3+by radiofrequency magnetron sputtering. The films were studied and we tried to understand the evolution of their optical and electrical properties. We noticed that the annealing temperature and the deposition pressures have an important influence on these properties. Thin films with good optical and electrical properties have been obtained. These films are transparent and are characterized by an intense red photoluminescence and a low fixed charge density. They are well dedicated for electroluminescence purposes.