A simple method for the preparation of transparent p-type Ca-doped CulnO 2 films: Pulsed-laser deposition from air-sintered Ca-doped Cu 2in 2O 5 targets

Abstract

We report the deposition of single-phase undoped and Ca-doped CuInO 2 thin films from a readily synthesized source target of Cu 2In 2O 5 - circumventing the very difficult fabrication of CuInO 2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be ∼3×10 -3 S/cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry. © 2004 American Institute of Physics.