An atmospheric-pressure, high-aspect-ratio, cold micro-plasma

Abstract

An atmospheric pressure nonequilibrium Ar micro-plasma generated inside a micro-tube with plasma radius of 3 μm and length of 2.7 cm is reported. The electron density of the plasma plume estimated from the broadening of the Ar emission line reaches as high as 3×1016 cm-3. The electron temperature obtained from CR model is 1.5 ev while the gas temperature of the plasma estimated from the N2 rotational spectrum is close to room temperature. The sheath thickness of the plasma could be close to the radius of the plasma. The ignition voltages of the plasma increase one order when the radius of the dielectric tube is decreased from 1 mm to 3 μm.