Study of a MEMS hybrid thermo-PZT micro actuator

Abstract

The current study presents an analytical model for a MEMS cantilever based hybrid thermo-piezoelectric micro actuator. The micro actuator structure consists of a unimorph type bending piezoelectric beam and a passive layer which uses the thermal bimorph principle. Primarily, under electrical and thermal loadings, the governing equations of motion are derived. After verification of the results, the deflection analysis of the micro actuator is performed. Moreover, the equivalent force at the actuator tip is obtained. To provide efficient optimization, the effects of the micro actuator geometrical and materials properties on the actuator tip deflection and force are investigated.