Application of virtual reality simulation in photolithography laboratory experiments

Abstract

Photolithography is an expensive and time-consuming process that involves the use of high-cost machines and materials. Students learning this process run the risk of damaging these components, and any mistakes the students make could cost a lot of time and money. This paper details a virtual reality simulation that is being developed to help mitigate these potential losses and lower the chance of equipment damage. This simulation could also be used for training purposes. The goal of this paper is to outline the history of virtual reality (VR), the use of VR in education and training, the reasons why VR is the best option for this project, and the creative process behind the photolithography simulation that has been created. This paper will also use data gathered from user testing to showcase the benefits and disadvantages of using a VR simulation for photolithography training purposes.