Applying Ag-TiO2/functional filter for abating odor exhausted from semiconductor and opti-electronic industries

Abstract

Some of the odor-related problems from the semiconductor and opti-electronic industries are caused by the volatile organic compounds, acetic acid, and dimethyl sulfide. These odorous exhausts would persecute residents' health and lower the environmental quality. In this study, Ag-TiO 2/functional filter was applied to removal these odorous compounds. The results indicated that K2CO3/activated carbon filter (ACF) would be the better composition of functional filter, which attributed to larger surface area of ACF and mid-alkalinity of K2CO3. Comparing the TiO2 type, P25 TiO2 (Degussa, Germany)/functional filter showed the more superior photodegradation efficiency than ST01 TiO2 (Ishihra Sangyo, Japan)/functional filter. In addition, Ag-modifying TiO2/functional filter enhanced the photocatalysis via postponing the recombination between electrons and holes. The 0.001 M AgNO3 solution was the optimal immersing concentration to make Ag dispersed uniformly on TiO2 surface. Operating from 25 to 50 C, the rising temperature was contributive to photodegradation efficiency due to the increase of system reaction energy. Processing photocatalysis below 75 % of relative humidity, existing humidity could be combined with holes to from hydronium (H3O+) and hydroxyl radical (OH-) to improve photodegradation. Assisted with ozone concentration ratio of 0.7 times, the removal efficiency for high pollutant concentration via Ag-TiO 2/functional filter could be improved up to 90 % until operating 180 min; this combined method could save the oxidant consumption more than single advanced oxidation method for processing pollutant. © 2012 The Author(s).