Abstract
A simulator that considers the roles of the ion and electron energy distributions on topography related charging is shown and verified by application to experimental results. The general results are that the charging voltages due to the directionality difference of ions and electronics are controlled by the population of low energy ions and that anything that increases this population reduces charging.
Cite
CITATION STYLE
APA
Kinoshita, T., Ma, S., Hane, M., & McVittie, J. P. (1996). Effects of ion energy distribution on topography dependent charging. In Digest of Technical Papers - Symposium on VLSI Technology (pp. 188–189). IEEE. https://doi.org/10.1109/vlsit.1996.507847
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