Microstructure and mechanical properties of nanocrystalline tungsten thin films

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Abstract

Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). The hardness and modulus were evaluated by nanoindentation. It is found that a 30 nm Cr sticking layer induces structure changes of deposited W film from β-W to α-W structure. In addition, remarkable hardness enhancement both for the deposited and annealed W films, were compared with that of bulk coarse-grained W, although their nanoindentation modulus is very close to that of corresponding bulk W. The intrinsic reasons that lead to structure changes and super hardness are discussed. Copyright © 2010 by The Editorial Board of Journal of Materials Science & Technology. Published by Elsevier Limited. All rights reserved.

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Sun, H. L., Song, Z. X., Guo, D. G., Ma, F., & Xu, K. W. (2010). Microstructure and mechanical properties of nanocrystalline tungsten thin films. Journal of Materials Science and Technology, 26(1), 87–92. https://doi.org/10.1016/S1005-0302(10)60014-X

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