A nanopore structured high performance toluene gas sensor made by nanoimprinting method

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Abstract

Toluene gas was successfully measured at room temperature using a device microfabricated by a nanoimprinting method. A highly uniform nanoporous thin film was produced with a dense array of titania (TiO2) pores with a diameter of 70~80 nm using this method. This thin film had a Pd/TiO2 nanoporous/SiO2/Si MIS layered structure with Pd-TiO2 as the catalytic sensing layer. The nanoimprinting method was useful in expanding the TiO2 surface area by about 30%, as confirmed using AFM and SEM imaging. The measured toluene concentrations ranged from 50 ppm to 200 ppm. The toluene was easily detected by changing the Pd/TiO2 interface work function, resulting in a change in the I-V characteristics. © 2010 by the authors.

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Kim, K. S., Baek, W. H., Kim, J. M., Yoon, T. S., Lee, H. H., Kang, C. J., & Kim, Y. S. (2010). A nanopore structured high performance toluene gas sensor made by nanoimprinting method. Sensors, 10(1), 765–774. https://doi.org/10.3390/s100100765

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