A novel dynamic pull-in MEMS gyroscope

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Abstract

The present paper analyzes numerically and experimentally the dependence of the dynamic pull-in voltage amplitude on the values of externally-induced accelerations (e.g. Coriolis accelerations in the case of vibratory gyroscopes). We have investigated the nonlinear dynamic behavior on two different device types, a micro-gyroscope (A) and a micro-accelerometer (B), both fabricated in the SOI-MUMPs process (25μm thick structural layer). Experimental measurements on the MEMS structures have been performed using Polytec MSA-500 equipment for analyzing the mechanical motion. They indicate that the dynamic pull-in voltages reduce from 100V to 56V for device A and from 21.77V to 17.3V for device B, for an equivalent acceleration of 0.319 ms- 2, when the structures are actuated at their resonance frequency. If the induced acceleration is translated into an equivalent angular rate, ω equivalent, modulating the Coriolis-induced motion, the dynamic pull-in voltages vary from 57.612V to 56.5V for device A type and from 20.9V to 10.75V for device B type, for a change of 1 rad/s to 5 rad/s in ω equivalent. © 2011 Published by Elsevier Ltd.

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Sharma, M., Sarraf, E. H., & Cretu, E. (2011). A novel dynamic pull-in MEMS gyroscope. In Procedia Engineering (Vol. 25, pp. 55–58). https://doi.org/10.1016/j.proeng.2011.12.014

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