Quantitative analysis of overlapping XPS peaks by spectrum reconstruction: Determination of the thickness and composition of thin iron oxide films

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Abstract

The composition and thickness of thin iron oxide iron were<br />evaluated from Fe 2p spectra as measured by X-ray photoelectron<br />spectroscopy. To this end the experimental spectra were<br />reconstructed from reference spectra of the constituents Fe/sup<br />0/, Fe/sup 2+/ and Fe/sup 3+/. The background contributions in the<br />spectra owing to inelastic scattering of signal electrons were<br />calculated from the depth distributions of these constituents and<br />their reference spectra. In the reconstruction procedure the film<br />thickness and the concentrations of Fe/sup 2+/ and Fe/sup 3+/ in<br />the oxide film were used as fit parameters. The values obtained<br />for the oxide film thickness were compared with thickness values<br />determined from the intensity of the corresponding O 1s spectra<br />and with thickness values resulting from ellipsometric analysis.<br />The sensitivity of the reconstruction procedure with regard to<br />film thickness and himcomposition was tested

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Graat, P., & Somers, M. A. J. (1998). Quantitative analysis of overlapping XPS peaks by spectrum reconstruction: Determination of the thickness and composition of thin iron oxide films. Surface and Interface Analysis, 26(11), 773–782. https://doi.org/10.1002/(SICI)1096-9918(199810)26:11<773::AID-SIA419>3.0.CO;2-#

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