This paper proposed the segmented magnetic circuit method to simulate the large displacement planar micro-coil (PMC) microactuator for micro-magnetic relay applications, which adopted enclosed miniaturized magnetic yokes. The segmented magnetic circuit model has been established to describe the magnetic flux variation and the redistribution effects of the magneto motive force (MMF) induced by the large air gap and large ratio between the radical and vertical size. Based on the optimized parameters, the PMC microactuator was fabricated through UV-LIGA technology and tested to verify the model under scrutiny. The large displacement was realized by using laminated photoresist sacrificial layer process. After comparing the measurement and simulation results, it is concluded that the modified model can describe the influence of key parameters over the output electromagnetic force. The proposed methodology is demonstrated to be efficient in the analysis and optimization of the magnetic MEMS devices of PMC structures with embedded magnetic yoke.
Miao, X., Dai, X., Huang, Y., Ding, G., & Zhao, X. (2014). Segmented magnetic circuit simulation of the large displacement planar micro-coil actuator with enclosed magnetic yokes. Microelectronic Engineering, 129(C), 38–45. https://doi.org/10.1016/j.mee.2014.07.006