Sequential combination of micro-milling and laser structuring for manufacturing of complex micro-fluidic structures

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Abstract

This paper deals with the combination of micro milling and laser micro structuring for processing hot embossing dies for micro-fluidic applications. This strategy permits the advantages of each process technology to be exploited in order to achieve a cost and time efficient process and also to process forms and structures which cannot be manufactured with the single processes micro milling and laser micro structuring. Basic requirements are a high-precision positioning of the single process areas and also a good machining of the parts and structures with the manufacturing processes micro milling and laser micro structuring. The intersections between the different processing areas present a challenge for this process technology. © 2011 Published by Elsevier Ltd.

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APA

Schubert, A., Groß, S., Schulz, B., & Eckert, U. (2011). Sequential combination of micro-milling and laser structuring for manufacturing of complex micro-fluidic structures. In Physics Procedia (Vol. 12, pp. 221–229). Elsevier B.V. https://doi.org/10.1016/j.phpro.2011.03.127

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