Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3

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Abstract

Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3 dielectrics have been fabricated on indium tin oxide-coated polyethylene naphthalate substrates by atomic layer deposition. A capacitance density of 7.8 fF/μm2 at 10 KHz was obtained, corresponding to a dielectric constant of 26.3. Moreover, a low leakage current density of 3.9 × 10−8 A/cm2 at 1 V has been realized. Bending test shows that the capacitors have better performances in concave conditions than in convex conditions. The capacitors exhibit an average optical transmittance of about 70% in visible range and thus open the door for applications in transparent and flexible integrated circuits.

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Zhang, G., Wu, H., Chen, C., Wang, T., Yue, J., & Liu, C. (2015). Transparent and flexible capacitors based on nanolaminate Al2O3/TiO2/Al2O3. Nanoscale Research Letters, 10(1). https://doi.org/10.1186/s11671-015-0784-8

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