In present paper we report the fabrication process of a high-temperature SAW-sensor based on a langasite crystal. Interdigital transducers of the SAW-resonator structures were fabricated from Ir which was evaporated using magnetron sputtering technique. The SAW-sensors were designed with different coefficient of metallization of an IDT, which strongly influences on the value of the SAW velocity and resonance excitation frequency, respectively. The process of the SAW excitation was investigated using high-resolution X-ray diffraction technique. © 2011 Published by Elsevier Ltd.
Sakharov, S., Roshchupkin, D., Emelin, E., Irzhak, D., Buzanov, O., & Zabelin, A. (2011). X-ray diffraction investigation of high-temperature SAW-sensor based on LGS crystal. In Procedia Engineering (Vol. 25, pp. 1020–1023). https://doi.org/10.1016/j.proeng.2011.12.251