AFM investigation of interface step structures on PVT-grown (0 0 0 1)Si 6H-SiC crystals

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Abstract

An AFM investigation of entire growth surfaces of PVT grown (0001)Si 6H-SiC crystals has revealed a number of typical growth interface structures. While step flow mode was observed within the central faceted area, step bunching, nano-steps and even atomically rough surfaces were observed within the peripheral convex area. The changes in growth mode are attributed to the variation of the undercooling along the growth interface. A correlation between the interface inclination α in respect to the (0001) plane and the corresponding growth mode has been determined for particular growth conditions (temperature, pressure). A non-uniform radial distribution of the charge carrier concentration n originated from uneven dopants incorporation has been investigated. The values of dopants concentration obtained from absorption measurements are correlated to different growth modes. © 2004 Elsevier B.V. All rights reserved.

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Herro, Z. G., Epelbaum, B. M., Weingärtner, R., Bickermann, M., Masri, P., & Winnacker, A. (2004). AFM investigation of interface step structures on PVT-grown (0 0 0 1)Si 6H-SiC crystals. Journal of Crystal Growth, 270(1–2), 113–120. https://doi.org/10.1016/j.jcrysgro.2004.05.107

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