A deconvolution technique for depth profiling with nuclear microanalysis

Abstract

A useful technique for extracting an accurate depth-concentration profile directly from an energy dispersive nuclear reaction or backscattering spectrum is presented. This method combines a Taylor's expansion of the spectrum yield with calculations of convolution integrals. The effects of energy straggling and multiple scattering are included and shown to be important. The method is tested by calculating concentrations from spectra in which targets of known composition were used. Finally, the method is applied to the deuterium analysis of deuterium-electrocharged nickel. © 1981.