Determination of piezoelectric coefficients of ferroelectric thin films using GaAs:Cr adaptive interferometer

  • Spirin V
  • Sokolov I
  • No K
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Abstract

We report on simple interferometric technique for the measurement of piezoelectric coefficients of thin films using GaAs:Cr adaptive photodetectors in the geometry of modified Mach-Zehnder interferometer. The technique needs no special vibroinsulation and automatically adjusts and keeps the operation point of the interferometer. Strong hysteresis effects with a slightly asymmetric form of the hysteresis loop were observed at the dependence of d33coefficients of the Pb(Zr,Ti)O3(PZT) thin film versus DC electric field. The obtained values of d33coefficients are in agreement with known data. © 2003 Elsevier Ltd. All rights reserved.

Author-supplied keywords

  • Adaptive photodetectors
  • PZT thin films
  • Piezoelectric coefficient

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Authors

  • V. V. Spirin

  • I. A. Sokolov

  • Kwangsoo No

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