Development of vacuum metrology in National Institute of Metrology

  • Li Y
  • Yu H
  • Wang J
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Abstract

Overview of the vacuum metrology development at the National Institute of Metrology, China is presented, including the different vacuum standards established years ago, the recently developed static expansion system and its characterization and the new compensated micro-manometer. Recent research of the performance of capacitance diaphragm gauges (CDGs) in Knudsen flow region, as well as the ongoing project on the constant pressure flow meter, micro-conductance measurement are also outlined. © 2011 Elsevier Ltd. All rights reserved.

Author-supplied keywords

  • Manometer
  • Static expansion system
  • Vacuum metrology
  • Vacuum standard

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Authors

  • Yanhua Li

  • Hongyan Yu

  • Jinku Wang

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