A d.c.-sputtering techique was employed to produce thin films of YBa2Cu3O7on SrTiO3, MgO, Al2O3and oxidized Si substrates. Pure oxygen was used as sputter gas at oxygen chamber pressures of up to 3 torr. Films deposited at temperatures down to 550°C were found to be superconducting without any additional heat treatment. Films of optimum quality were produced on SrTiO3at 670°C. In this case the films grew epitaxially with the c-axis of the orthorhombic structure parallel to the (0 0 1) substrate normal. The transition to the superconducting state was complete at 81 K and the critical current density at 6 K was found to be 2 X 106A cm-2. © 1988.
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