Effect of Al content on the properties of Cr1-xAlxC films prepared by RF reactive magnetron sputtering

  • Fu T
  • Li G
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Abstract

Cr1-xAlxC films were deposited on high-speed steel by RF reactive magnetron sputtering. In this study, we aimed to identify the effect of the Al content on the properties of Cr1-xAlxC films. We found that Cr1-xAlxC films exhibited a fine columnar grain microstructure with some special characteristics, such as high hardness of Hv 1426, a low friction coefficient of 0.29, and a large contact angle of 90° for x = 0.18. Furthermore, an increase in Al content resulted in a decrease in film hardness and an increase in contact angle. Moreover, on annealing at 923 K, the mechanical properties of the films improved and a dense protective film of complex Cr2O3and Al2O3oxides was formed on the surface for better wear resistance, which will ultimately increase the lifetime of the high-speed steel substrate. © 2006 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Aluminum
  • Chromium carbides
  • Sputtering

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Authors

  • Tsow Chang Fu

  • Guo Wei Li

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