Citations of this article
Mendeley users who have this article in their library.
Get full text


A method for improving the accuracy of simple ellipsometers of the fixed retarder and fixed angle of incidence type is presented. All the appratus parameters affecting measurement accuracy-the retarder characteristics, the azimuthal alignment of the polarizer, analyser and retarder and the angle of incidence-can be checked and numerically aligned using only a number of measurement results. The method can be performed with a desk computer does not require alignment tools or standards. © 1979.




Riedling, K. (1979). Evaluation of adjustment data for simple ellipsometers. Thin Solid Films, 61(3), 335–340. https://doi.org/10.1016/0040-6090(79)90478-4

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free