A method for improving the accuracy of simple ellipsometers of the fixed retarder and fixed angle of incidence type is presented. All the appratus parameters affecting measurement accuracy-the retarder characteristics, the azimuthal alignment of the polarizer, analyser and retarder and the angle of incidence-can be checked and numerically aligned using only a number of measurement results. The method can be performed with a desk computer does not require alignment tools or standards. © 1979.
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