The fiber texture, surface composition and homogeneity of polycrystalline films of gold 300-2000 Å thick evaporated onto quartz in the pressure range from 1.5 × 10-2to 2 × 10-7Pa were investigated by means of X-ray diffraction, electron microscopy, Auger electron spectroscopy and gas sorption experiments. No qualitative differences are observed between the films characterized here and previous results reported for glass substrates: a (111) fiber orientation is observed and is enhanced as the substrate temperature, during or after the deposition, is increased. The percentage of gold present at the surface and the surface homogeneity are more sensitive to the cleaning and outgassing procedure than to the actual pressure during deposition. The uniformity of the quartz substrate has little influence on the surface homogeneity of the gold film. © 1986.
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