We have investigated local structures of ErP grown by organometallic vapor phase epitaxy Er source: tris(ethylcyclopentadienyl)erbium (Er(EtCp)3by extended X-ray absorption fine structure (EXAFS) measurement. The EXAFS analysis revealed that NaCl-type ErP and Er-O(-C) compounds coexisted in the case of ErP growth by using Er(EtCp)3. The NaCl-type ErP was preferentially formed on InP(111)A compared with InP(001) and InP(111)B. It is considered that formation of unexpected Er-O(-C) compounds is due to low but significant concentration of residual O and/or C in Er(EtCp)3. © 2003 Elsevier Ltd. All rights reserved.
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