Hydrogen contents and related properties of a-C:H formed with unbalanced magnetron sputtering

  • Xu G
  • Hibino Y
  • Kurotobi K
 et al. 
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Abstract

Hydrogenated amorphous carbon (a-C:H) coatings have been deposited on titanium substrate with an unbalanced magnetron sputtering apparatus. The hydrogen contents of the coatings were adjusted by introducing hydrogen-containing gases such as hydrogen, methane, and acetylene. The hydrogen contents of the coatings are determined using elastic recoil detection. The effects of the hydrogen contents on the related properties such as hardness, Raman spectra, contact angle, and adsorption of human serum albumin have been discussed. © 2003 Elsevier Science B.V. All rights reserved.

Author-supplied keywords

  • Hydrogen content
  • Unbalanced magnetron sputtering
  • a-C:H

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Authors

  • G. C. Xu

  • Y. Hibino

  • K. Kurotobi

  • Y. Suzuki

  • M. Iwaki

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