Creep drift of piezoelectric actuators in solder paste 3D inspection was difficult to be accurate calibrated. Connected with actuated projecting grating, this paper proposed a new calibration method that a quarter-cycle sinusoidal grating was used for projection to substitute normal cycle grating and two phase-shift sinusoidal gray images were matched to calculate displacements. As calibration conditions including image capturing time delay were the same as in 3D measuring working, the creep drift and non-linear of PZT were all considered. Experimental results show that the PZT was delicate calibrated and 3D reconstructed accuracy was effectively improved. © 2011 Published by Elsevier Ltd.
Luo, B., & Liu, J. (2012). Image based PZT control calibration for 3D measurement. In Procedia Engineering (Vol. 29, pp. 2737–2743). https://doi.org/10.1016/j.proeng.2012.01.382