Creep drift of piezoelectric actuators in solder paste 3D inspection was difficult to be accurate calibrated. Connected with actuated projecting grating, this paper proposed a new calibration method that a quarter-cycle sinusoidal grating was used for projection to substitute normal cycle grating and two phase-shift sinusoidal gray images were matched to calculate displacements. As calibration conditions including image capturing time delay were the same as in 3D measuring working, the creep drift and non-linear of PZT were all considered. Experimental results show that the PZT was delicate calibrated and 3D reconstructed accuracy was effectively improved. © 2011 Published by Elsevier Ltd.
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