Impact of device geometry and doping strategy on linearity and RF performance in Si/SiGe MODFETs

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Abstract

Based on careful calibration in respect of 70 nm n-type strained Si channel Si/SiGe modulation doped FETs (MODFETs) fabricated by Daimler Chrysler, numerical simulations have been used to study the impact of the device geometry and various doping strategies on device performance and linearity. Both the lateral and vertical layer structures are crucial to achieve high RF performance or high linearity. The simulations suggest that gate length scaling helps to achieve higher RF performance, but degrades the linearity. Doped channel devices are found to be promising for high linearity applications. Trade-off design strategies are required for reconciling the demands of high device performance and high linearity simultaneously. © 2004 Elsevier Ltd. All rights reserved.

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Yang, L., Asenov, A., Watling, J. R., Boriçi, M., Barker, J. R., Roy, S., … Hackbarth, T. (2004). Impact of device geometry and doping strategy on linearity and RF performance in Si/SiGe MODFETs. In Microelectronics Reliability (Vol. 44, pp. 1101–1107). https://doi.org/10.1016/j.microrel.2004.04.003

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