In-situ Fourier transform infrared spectroscopy of electrochemical processes at the silicon-acetonitrile interface

  • Boonekamp E
  • Kelly J
  • van der Ven J
 et al. 
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Abstract

A new approach is used for the study of the semiconductor-solution interface with Fourier transform IR spectroscopy (FTIRS) in the multiple total internal reflection mode. In this method, a thin semiconductor wafer is mounted on a germanium internal reflection crystal by wafer-bonding. Measurements are possible in a wide frequency range (800-4000 cm-1). The potential of the method is demonstrated by measurements on the anodic oxidation in acetonitrile containing a low concentration water of n-type silicon (111) surfaces pretreated in hydrofluoric acid solution. The experiments show that detection of surface bound species (SiH, SiOSi) is possible with submonolayer sensitivity. © 1993.

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Authors

  • E. P. Boonekamp

  • J. J. Kelly

  • J. van der Ven

  • A. H.M. Sondag

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