Ion irradiation effects on SrCeO3 thin films

  • Matsunami N
  • Shimura T
  • Iwahara H
 et al. 
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Ion irradiation effects on a proton conductive oxide, i.e. SrCe0.95Yb0.05O3-δ(SCO) have been investigated by measurements of sputtering yield, modifications of compositions and structure. The sputtering yields of SCO by 100 keV Ar+and Ne+are determined as 1.6 and 0.55 atoms per ion, respectively. The compositions remain nearly stoichiometric under ion irradiation. The experimental sputtering yields are compared with those of computer simulations based on the elastic-collision cascade and the surface-binding energies for sputtering, dependent on the simulation version, are deduced. These values are compared with those derived from the thermodynamic properties. The elastic collisions appear to be dominant. © 2002 Elsevier Science B.V. All rights reserved.

Author-supplied keywords

  • Ion irradiation
  • Proton conductive perovskite oxide
  • Sputtering yields
  • SrCeO3

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