Large scale high precision nano-oxidation using an atomic force microscope

  • Kuramochi H
  • Ando K
  • Tokizaki T
 et al. 
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Abstract

Scanning probe microscope nano-oxidation is carried out on H-passivated Si(001) surfaces using a humidity control atomic force microscope (AFM) in contact and dynamic modes. To achieve high precision nano-oxidation at large scale, the original tube-scanner-based AFM unit is modified: horizontal movement of the whole sample block (sample stage and the scanner) is operated by an additional XY piezo stage, whilst its vertical movement is controlled by a piezo tube-scanner. The high linearity of the horizontal movement is demonstrated by high resolution oxide patterns which are fabricated after the instrumental modification using standard AFM cantilevers and a modified AFM cantilever with an added carbon nano-tube on tip. © 2004 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Atomic force microscopy
  • Oxidation
  • Silicon

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