Low cost ESR based X-ray beamline for lithography experimentation

Citations of this article
Mendeley users who have this article in their library.
Get full text


Any application of the electron storage ring (ESR) based X-ray lithography technology requires an X-ray radiation transport system to transfer the synchrotron radiation into a spectrum defined by the lithography process requirements. Structure of this transport system (i.e. the beamline) depends on the nature of the application. In this paper a beamline conceptual design will be discussed. The beamline is intended for the development of X-ray lithography technology. © 1992.




Kovacs, S., Doumas, A., & Truncale, M. (1992). Low cost ESR based X-ray beamline for lithography experimentation. Nuclear Inst. and Methods in Physics Research, A, 319(1–3), 366–370. https://doi.org/10.1016/0168-9002(92)90579-S

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free