Low cost ESR based X-ray beamline for lithography experimentation

  • Kovacs S
  • Doumas A
  • Truncale M
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Abstract

Any application of the electron storage ring (ESR) based X-ray lithography technology requires an X-ray radiation transport system to transfer the synchrotron radiation into a spectrum defined by the lithography process requirements. Structure of this transport system (i.e. the beamline) depends on the nature of the application. In this paper a beamline conceptual design will be discussed. The beamline is intended for the development of X-ray lithography technology. © 1992.

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Authors

  • S. Kovacs

  • A. Doumas

  • M. Truncale

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