Low cost ESR based X-ray beamline for lithography experimentation

  • Kovacs S
  • Doumas A
  • Truncale M
  • 1


    Mendeley users who have this article in their library.
  • 0


    Citations of this article.


Any application of the electron storage ring (ESR) based X-ray lithography technology requires an X-ray radiation transport system to transfer the synchrotron radiation into a spectrum defined by the lithography process requirements. Structure of this transport system (i.e. the beamline) depends on the nature of the application. In this paper a beamline conceptual design will be discussed. The beamline is intended for the development of X-ray lithography technology. © 1992.

Get free article suggestions today

Mendeley saves you time finding and organizing research

Sign up here
Already have an account ?Sign in

Find this document


  • S. Kovacs

  • A. Doumas

  • M. Truncale

Cite this document

Choose a citation style from the tabs below

Save time finding and organizing research with Mendeley

Sign up for free