Low cost ESR based X-ray beamline for lithography experimentation

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Abstract

Any application of the electron storage ring (ESR) based X-ray lithography technology requires an X-ray radiation transport system to transfer the synchrotron radiation into a spectrum defined by the lithography process requirements. Structure of this transport system (i.e. the beamline) depends on the nature of the application. In this paper a beamline conceptual design will be discussed. The beamline is intended for the development of X-ray lithography technology. © 1992.

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Kovacs, S., Doumas, A., & Truncale, M. (1992). Low cost ESR based X-ray beamline for lithography experimentation. Nuclear Inst. and Methods in Physics Research, A, 319(1–3), 366–370. https://doi.org/10.1016/0168-9002(92)90579-S

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