Low temperature synthesis of single crystalline ZnO nanorods by oblique angle deposition

  • Teki R
  • Parker T
  • Li H
 et al. 
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The authors report the growth of single crystalline ZnO nanorods by direct current magnetron sputtering in the oblique angle deposition configuration near room temperature. These isolated nanorods have a diameter of ∼ 40 nm, an inter-rod spacing of ∼ 20 nm, and a height of ∼ 100 nm. The nanorods show a (002) orientation along the rod-axis which is normal to the substrate. The low temperature fabrication of single crystal ZnO nanorods may find potential applications in optoelectronics and energy conversion devices. © 2007 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Magnetron sputtering
  • Nanorods
  • Oblique angle deposition
  • ZnO

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  • Ranganath Teki

  • Thomas C. Parker

  • Huafang Li

  • Nikhil Koratkar

  • Toh Ming Lu

  • Sabrina Lee

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