Magnetic properties of an SmCo/NiFe system for magnetic microactuators

  • Budde T
  • Gatzen H
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For investigating the process compatibility of sputter-deposited SmCo and electroplated NiFe the system Cr/SmCo/Cr/NiFe/Cr/substrate was investigated. Magnetic properties achieved for SmCo in either sandwich for in-plane measurements are a coercivity of 800 kA/m, a remanence of 0.5 T as well as a maximal energy product of 20 kJ/m3. It could also be observed, that the permeability of the NiFe improved due to the SmCo annealing process. © 2003 Elsevier B.V. All rights reserved.

Author-supplied keywords

  • Magnetic annealing
  • Microactuator
  • Permanent magnet
  • SmCo

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  • Thomas Budde

  • Hans H. Gatzen

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