Magnetic properties of an SmCo/NiFe system for magnetic microactuators

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For investigating the process compatibility of sputter-deposited SmCo and electroplated NiFe the system Cr/SmCo/Cr/NiFe/Cr/substrate was investigated. Magnetic properties achieved for SmCo in either sandwich for in-plane measurements are a coercivity of 800 kA/m, a remanence of 0.5 T as well as a maximal energy product of 20 kJ/m3. It could also be observed, that the permeability of the NiFe improved due to the SmCo annealing process. © 2003 Elsevier B.V. All rights reserved.




Budde, T., & Gatzen, H. H. (2004). Magnetic properties of an SmCo/NiFe system for magnetic microactuators. In Journal of Magnetism and Magnetic Materials (Vol. 272–276, pp. 2027–2028). Elsevier.

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