Skip to main content
Book Chapter

Modeling magnetic fields of magnetron sputtering systems

  • Wong M
  • Sproul W
  • Rohde S
Elsevier, (1991), 121-126
DOI: 10.1016/b978-0-444-89455-7.50028-9
N/ACitations
Citations of this article
N/AReaders
Mendeley users who have this article in their library.
Get full text

Cite

CITATION STYLE

APA

Wong, M. S., Sproul, W. D., & Rohde, S. L. (1991). Modeling magnetic fields of magnetron sputtering systems. In Metallurgical Coatings and Thin Films 1991 (pp. 121–126). Elsevier. https://doi.org/10.1016/b978-0-444-89455-7.50028-9

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free