Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition

Citations of this article
Mendeley users who have this article in their library.
Get full text


We have developed a multilevel-type multilayer X-ray lens (Fresnel zone plate, FZP) using sputter deposition. Such a multilevel-type FZP can attain high diffraction efficiency which results in the reduction of radiation damage to biological specimens and the simplification of the X-ray optical system because unwanted diffraction orders are considerably suppressed. Previously, we have reported the effectiveness (i.e., realizing high diffraction efficiency) of a multilevel multilayer FZP with 4-step structure. This paper presents two experimental results on the FZP: (1) the focusing test of a multilayer FZP with 6-step structure in order to realize higher efficiency and (2) the change over time of the focusing characteristic of the FZP with 4-step structure. For (1), the diffraction efficiency of the 1st order focus and the focused beam size measured by knife-edge scanning were found to be more than 50% and 0.8 μm, respectively, at 41.3 keV, and superior to the previous results. For (2), no significant differences have been observed: it can be said that the multilevel FZP is stable at least for 9 months. © 2008 Elsevier Ltd. All rights reserved.




Tamura, S., Yasumoto, M., Kamijo, N., Takeuchi, A., Uesugi, K., & Suzuki, Y. (2008). Multilevel-type multilayer X-ray lens (Fresnel zone plate) by sputter deposition. Vacuum, 83(3), 691–694.

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free