Numerical simulation of effect of ampoule rotation for the growth of InGaSb by rotational Bridgman method

  • Ozawa T
  • Hayakawa Y
  • Balakrishnan K
 et al. 
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Abstract

To investigate the solution convection for the rotational Bridgman method, both flow patterns and temperature distributions in the In-Ga-Sb solution were calculated. In the three-dimensional model, In-Ga-Sb solution was put between a GaSb seed and feed crystals, where the seed and feed crystals were of cylindrical shape, and the In-Ga-Sb solution was of semi-cylindrical shape. The flow velocity in the In-Ga-Sb solution increased and the temperature distribution tended to be uniform with increase of the ampoule rotation rate. When the ampoule rotation rate was 0rpm, the temperature difference at the solid-liquid inteace increased with an increase of the aspect ratio. However, with an increase of ampoule rotation rate, the temperature difference became small. The stirring effect of the ampoule rotation was enhanced with an increase of rotation rate as the forced convection became dominant in the In-Ga-Sb solution. © 2002 Elsevier Science B.V. All rights reserved.

Author-supplied keywords

  • A1. Convection
  • A1. Heat transfer
  • A2. Growth from solution
  • B1. Gallium compounds
  • B2. Semi-conducting III-V materials

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Authors

  • T. Ozawa

  • Y. Hayakawa

  • K. Balakrishnan

  • M. Kumagawa

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