Piezoelectric effect in RF sputtered ferroelectric thin films

  • Czekaj D
  • Surowiak Z
  • Bakirov A
 et al. 
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Author-supplied keywords

  • films
  • perovskites
  • piezoelectric properties
  • rf sputtering
  • x-ray methods

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  • D Czekaj

  • Z Surowiak

  • a.a Bakirov

  • V.P Dudkievich

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