Preparation by dc single target sputtering and characterization of superconducting BiSrCaCuO films

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Abstract

BiSrCaCuO films (0.3 to 1.5 μm) were successfully prepared on MgO (100) substrate, using a simple dc single target sputtering system with a pure Ar plasma, and post-deposition annealing. A first drop of the resistance versus T is observed at 110-120 K; the main transition occurs at 85 K with zero resistance at 80 K. Films are characterized by X ray diffraction, RBS and SEM analysis. © 1988.

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Raffy, H., Vaurès, A., Arabski, J., Megtert, S., Rochet, F., & Perrière, J. (1988). Preparation by dc single target sputtering and characterization of superconducting BiSrCaCuO films. Solid State Communications, 68(2), 235–238. https://doi.org/10.1016/0038-1098(88)91107-6

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