Preparation of phosphorous dope beta-irondisilicide thin films and application for devices

  • Ehara T
  • Nakagomi S
  • Kokubun Y
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Ehara T, Nakagomi S, & Kokubun Y. (2003). Preparation of phosphorous dope beta-irondisilicide thin films and application for devices. Solid-State Electronics, 47(2), 353-356(4).

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