The preparation by a chemical method of thin yttria-stabilized zirconia (YSZ) films on substrates of single crystalline silicon and sapphire, optical silica glass and alumina ceramics has been investigated. A sol-gel procedure is used during which an isopropanol sol of Zr-propoxide and Y-isopropoxide along with ethyl acetoacetate as a chelating agent and an equivalent amount of water is spin coated on the substrate. Well crystallized YSZ films are formed on the substrates after heat-treatment of the amorphous gel coatings. These films, having a thickness of 1200-1500 Å, are characterized by a very good adhesion to the substrate, the lack of cracks and, especially on silicon and silica glass substrates, a very smooth surface. © 1992.
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